The Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems (Nano-CEMMS) at the University of Illinois Urbana-Champaign is developing a variety of new scalable Process Technologies, each with unique capabilities that can be employed with a Center-developed high performance micro/nano manufacturing platform to produce with high precision large arrays of nanoscale lines, dots, patterns and structures with a wide variety of materials. The Center is also furthering the development of Enabling Technologies for the monitoring and control necessary to employ the Center process technologies.  These include fabrication of new microfluidic networks with embedded micro/nano-scale pumps, valves and sensing elements as well as advanced positioning stages and control schemes. New Sensing Technologies are needed for the nano-precision positioning and control of the manufacturing platform, as well as electronic and optical sensing elements for controlling and monitoring nano/picco liter fluid flows in the enabling microfluidic networks.  Also, new optical and electronic sensing technologies are arising from the nanoscale structures and patterns made possible with the Center process technologies.

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The Center for Nanoscale Science and Technology at the University of Illinois Urbana-Champaign works toward a seamless integration of interdisciplinary research from atoms and materials to devices and systems. Campus faculty members, graduate and undergraduate students, industry partners and collaborating scientists from government laboratories and higher education institutions around the world come together through the Center.
With a strong research and teaching faculty, some of the best students in the nation, more than $160 million invested in equipment, and a vitally strong partnership program, the Center is a leader in groundbreaking nanotechnology research.

The Center for Microanalysis of Materials (CMM) in the Fredrick Seitz Materials Research Laboratory at the University of Illinois Urbana-Champaign is an integrated facility containing the full array of modern nanostructural and nanochemical analysis techniques including electron microscopy (SEM, TEM, STEMs, high-pressure environmental cell TEM, high-temperature LEEM, focused ion beam microscopy, scanning probe microscopy, variable-temperature STM), surface microanalysis (SIMS, TOF-SIMS, AES, XPS, imaging XPS, electrochemical XPS), x-ray scattering in all modes and ion-beam spectroscopies (RBS, channeling and NRA).

The MRL Micro/Nanofabrication Facility is a multidisciplinary, user-supported facility providing equipment and resources for deposition of thin film material and the fabrication of patterned micro- and nano-sized structures, including SQUIDs, MEMs, nanotube, flexible and other multi-layer electronic devices.The facility operates a 1,400-square foot, class-100 cleanroom with a 400-square foot nano-science cleanroom that is integrated within more than 3,000-square feet of additional instrumentation and tools. The facility provides mulitple high-vacuum PVD and Etching systems combined with high precision optical lithography and e-beam lithography tools capable of 5 nanometer line resolution allowing state of the art pattern delineation and device fabrication